The new generation of mask aligner UV-KUB 3 is particularly suited for the production, through soft lithography, of microfluidic chip, integrated optical circuits, microelectronics, MEMS, semiconductor technology...

Fully secure thanks to its dust-proof hood, this equipment is the only solution on the market that democratizes precision photolithography without requiring a cleanroom type environment.

Resolution and alignment precision

Its design makes possible the realization of microstructures below 1 µm over the entire 4" or 6" work surface with an alignment precision of less than 1 µm.

Advantages of the UV-LED exposure technology

• illumination source devoid of undesirable thermal effects
• perfectly monochromatic
• lifetime of the LEDs > 10 000h: requires no specific maintenance

A compact mask alignment system

Beyond its size reduced to a minimum, its internal supporting structure dispenses the need for anti-vibration table, combined with low power consumption, the UV-KUB 3 is the ideal tool to control the operating costs.

A removable photomask holder

The photomask holder is removable: you can change the substrate as often as you want without touching the photomask. It allows to save a lot of time in production mode and thus, improve the efficiency of the automatic prealignment function.

User-friendly and efficient

With the UV-KUB 3 make precision mask alignments of less than 1 µm in few minutes with the ergonomic control joypad or with the help of the dynamic and intuitive tactile interface.

Low cost equipment

UV-KUB 3 is the less expensive high resolution mask aligner offered in the international market place.

Special field of application of the mask aligner 6 inches version

The mask aligner UV-KUB 3, 6 inches version, is perfectly well suited for:

• semiconductor technology
• microfluidics lab on a chip fabrication