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UV LED masker : UV-KUB 2
Exposure‑masking system: UV‑KUB 2
The exposure and masking system UV-KUB 2, is the first UV-LED masking system available on the international market. The UV-KUB 2 is a compact exposure-masking system equipped with an LED based optical head, collimated and homogeneous.
Its masking function enables to reach resolutions less than 2µm. This system is compatible with any of the most popular photoresists such as AZ series, Shipley series, SU-8 and K-CL series.
A new approach of masking
With the UV-KUB 2 you benefit from the LED technology that generates a cold UV source, therefore eliminating undesirable thermal effects and form a perfectly monochromatic illumination.
By its hermetic configuration, the UV-KUB 2 is an ideal exposure equipment for your laboratory or clean-room. Compact and controlled by touchscreen, the UV-KUB 2 ensures safety through an entirely closed exposure chamber, with both hard or soft contact modes available. The lifetime of the LEDs (>10000h) that form the UV source makes it highly reliable and robust, with no particular maintenance needed.
It is a laboratory equipment especially well suited for the creation of microfluidic systems, integrated optical circuits and surface microstructuration by photolithography.
UV-KUB : LED generation
Unrivalled collimation performance
Kloé company has paid particular attention to the unique and specific optical processing chain based on its broad experience in this field.
The collimated system of the UV LEDs that equips the UV-KUB 2 enables to benefit from an homogeneous exposure better than 5% of variation over the 4 inches working surface.
The angle of divergence of the UV light source is less than 2°. Therefore the achievement of patterns with less than 2µm of resolution and with excellent verticality of edges on thick layers is guaranteed.
- Resolution : 2µm
- Wavelength : 365nm or 405nm
- Power density : 40mW/cm²
- Substrate warm-up during exposure : < 1° C
- Exposure cycle : entre 1s and 18h
- Number of programmable cycles : 10
- Dimensions : 260 x 260 x 260 mm
- Weight : 8,2 kg
- Colour touchscreen : 5, 7 pouces
- Power supply : 110V/230V - 50Hz/60hz
- Consumption : 180W