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Insolator high power density : UV-KUB 9

Large surface exposure : UV-KUB 9

UV high-powered system

The large surface exposure system UV-KUB 9 is a cold-UV exposure system based on LED technology emitting a high power density, homogeneous and monochromatic illumination (145mW/cm²) at 365nm over a working surface of 9 inches. It is the ideal equipment for applications like wafer bonding, temporary bonding and blue tape exposure used for dicing microelectronic wafers, especially issued from grinding technologies.

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UV-KUB 9 - INSOLATEUR UV FORTE PUISSANCE

High power density in complete safety

The LED based light source that equips UV-KUB 9 enables you to benefit from an adjustable high power density of cold UVs.

This non-collimated source is homogeneous at +/- 5% over a working surface of 9 inches. The substrate holder can receive 4, 6 and 8 inches diameter wafers and dicing mainframes of 7 and 9 inches for  "blue tapes" UV exposure. The total exposure time for the inhition of "blue tapes" at full power is around 20 seconds. All functions of UV-KUB 9 are controlled by touchscreen.
Opening and closing of the insertion-extraction drawer is manual, it guarantees a perfect protection of the user against any UV exposure while processing.

UV-KUB : LED generation

UV-KUB : LED generation

COMPACT AND VERY LOW ENERGY COMSUMPTION

Performances: 
  • Wavelength​ :  365nm +/- 5nm
  • Power density​ : 200mW/cm²
  • Substrate warm-up during exposure : < 2° C
  • Exposure cycle : entre 1s and 1h
  • Number of programmable cycles  : 10
Specifications: 
  • Dimensions : 350  x 345 x  355 mm
  • Weight : 22 kg
  • Colour touchscreen :  5, 7 pouces
  • Power supply : 110V/230V - 50Hz/60Hz
  • Consumption​ : 800W
  • Exposure time blu tapes : ADWILL D650 -15s
  • Exposure time blu tapes : ADWILL D175 P370 - 45s
Related domains of application: