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Mask Aligner: UV-KUB 3

New generation of mask aligner

First compact system with UV-LED

The mask aligner UV-KUB 3 is the first mask alignement system equipped with a UV-LED source on the international market.

Compact, easy to use and efficient, the UV-KUB 3 allows alignment up to 7" mask with substrates up to 6" in a cube volume

Compatible with all standard photoresists: AZ, Shipley, SU8 and K-CL

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The UV-KUB 3 is a laboratory equipment particularly suited for the production, through photolithography, of:

  • microfluidic systems
  • optical integrated circuits
  • microelectronics
  • MEMS

Fully secure thanks to its dust-proof hood, this equipment is the only solution on the market that democratizes precision photolithography without requiring a cleanroom type environment.

Its design makes possible the realization of microstructures below 1 µm over the entire 4" or 6" work surface with an alignment precision of less than 1 µm.

The UV-LED exposure technology:

  • illumination source devoid of undesirable thermal effects
  • perfectly monochromatic
  • lifetime of the LEDs > 10000h: requires no specific maintenance

Control the operating costs:

  • size reduced to a minimum
  • internal supporting structure (no need for anti-vibration table)
  • low power consumption



User-friendly and efficient

With the UV-KUB 3 make precision mask alignments of less than 1 µm in few minutes with the ergonomic control joypad or with the help of the dynamic and intuitive tactile interface.

  • Resolution: 1µm
  • Accepted masks size: up to Ø 5" or Ø 7" depending on the version
  • Accepted substrate size: Ø 2" - Ø 4" - Ø 6" and 50x50mm - 100x100mm
  • Visualization system resolution: 1,5 µm
  • Mask/substrate measuring distance resolution: 0,5 µm
  • θ substrate displacement resolution: 5.10-4°
  • XYZ substrate displacement resolution: 0,4 µm (0,2 µm in option)
  • Wavelength: 365nm +/- 5nm
  • Power density: 35mW/cm² +/- 10%
  • Substrate warm-up during exposure: < 1° C
  • Exposure cycle: between 1s and 1h
  • Number of programmable cycles: > 100
  • Dimensions: 475 x 480 x 515mm
  • Weight: 55kg / 121lbs
  • Displacement control: USB or wireless 24 key PAD
  • Colour touchscreen: 15.6 inches
  • Power supply: 100V/240V - 50Hz/60Hz
  • Consumption: 180W
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