Mask Aligner: UV-KUB 3

The UV-KUB 3 is a laboratory equipment particularly suited for the production, through photolithography, of:

• microfluidic systems
• optical integrated circuits
• microelectronics
• MEMS

Fully secure thanks to its dust-proof hood, this equipment is the only solution on the market that democratizes precision photolithography without requiring a cleanroom type environment.

Its design makes possible the realization of microstructures below 1 µm over the entire 4" or 6" work surface with an alignment precision of less than 1 µm.

The UV-LED exposure technology:

• illumination source devoid of undesirable thermal effects
• perfectly monochromatic
• lifetime of the LEDs > 10000h: requires no specific maintenance

Control the operating costs:

• size reduced to a minimum
• internal supporting structure (no need for anti-vibration table)
• low power consumption