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LED insolation and masking system

The UV KUB range is composed of 3 UV masking systems for photolithography based on UV LED light source:

 LED masker : UV-KUB 2

LED masker : UV-KUB 2

Learn more : UV-KUB 2

Advantages of UV-KUB2

The UV KUB 2 tools are soft lithography equipment proceeding by masking technique, equipped of a UVLED light-based source, which emit at 365nm +/-5nm. Thanks to this, the source is almost mono-chromatic and constitutes a cold UV source, strongly recommended for patterns in thick layer resins as it is often the case for micro-fluidic applications.The collimation quality means you can benefit from a divergence angle below 2°, which offers the possibility to work in masking mode on thick layers without altering the rendering of edges of the patterns. This high-quality collimation allows to reach resolution down to the micrometre scale without needing a vacuum contact mode, which is often a source of damage for the photolithographic masks. Finally, the LED lifetime is much longer than the traditional mercury lamp one and a lot less polluting. The UV-KUB 2 source is no longer to be considered as a consumable because it will never have to be replaced during the equipment lifetime.

Characteristics of the exposure system

This equipment comes in two versions, the 4-inch and the 6-inch versions. The 4-inch version works in standard with 5-inch chrome photomasks whereas the 6-inch version works in standard with 7-inch photomasks. Naturally, samples with smaller dimensions can be processed without minimum limitations. Photomasks with inferior dimensions may also be used, thanks to masks adaptors that can be supplied by Kloé. The UV KUB 2 are fitted with touch-screens that ensure a very intuitive use of the equipment. The user of this machine is guided in the menu to configure the required exposure parameters. He can then adjust the power density, the exposure duration to UV as well as the curing mode either in continuous or by pulsation mode. He can then end by adjusting the distance between the sample and the photomask, in hard or soft contact. All these parameters can be saved to avoid retyping them for each use. This extremely small system 26X26X26 cm3, is in fact the most compact one on the market. Totally enclosed while working, it assures utmost security to the user who is at no time exposed to the high UV power density and thus doesn’t need to be installed in a clean room.

Domains of application of the UV-KUB 2

Its price is also very competitive and makes it the ideal soft lithography tool for microfluidic researchers’ application for which the UV KUB 2 was initially created. It is also popular for MEMS applications, as well as for microtechnology teaching with students. Finally, it may be used as a spare mask aligner for the creation of first level masking. Thus, the mask aligner remains solely for mask alignment.

Mask aligner : UV-KUB 3

The UV KUB 3 makes up a new generation of mask aligners and totally revolutionises maskless photolithography.

Learn more: UV-KUB 3

Advantages of UV-KUB 3 LED lamps

This technology is accessible to everyone. It is fast and easy to set up without the need for tedious training. The UV KUB 3 is a mask aligner that works following the same principle as UV KUB 2. It is equipped with the same UV LED source, with the same collimation quality, offering the possibility to obtain 1µm resolution and even submicronic resolution without the need for a vacuum contact function, too often responsive from the damage of chrome photomasks. It is also fitted with an intuitive and user-friendly touch-screen for the introduction of curing parameters. The UV KUB 3 is without doubt the most compact mask aligner and the most cost effective on the market, offering comparable performances and even better than other more traditional mask aligners technologies. Thus, by owning a UV-KUB 3, you can access advanced of mask alignment technology.

Characteristics of the exposure system

UV-KUB 3 is equipped with two CDD cameras instead of the traditional binoculars considered as too fragile and tiresome by numerous users. The images from of the two cameras are simultaneously projected onto the touchscreen enabling the two alignments points to be viewable at the same time. The alignment procedure is thus easy and. The alignment within a 2µm precision can thus be obtained in a few minutes with the help of the PAD, PlayStation type, easy to use and very well-known by the young generation. This mask aligner is fitted with an on-board PC that can capture images, do the metrology and above all, that can record the alignment coordinates points of several masks. Consequently, when the mask is being introduced into the system, the two high-resolution cameras position themselves automatically at the location registered in the on-board PC. This step is totally transparent for the user, constitutes a pre-alignment that allows the user to save a lot of time for this too often tedious search of the alignment marks with more traditional technologies. The UV KUB 3 mask aligner is extremely compact (45X45X45 cm3 in the two 4 and 6-inch versions) and thus uses minimum space in the clean room. It is totally closed ensuring maximum safety to the user and does not need for a systematic installation in a clean room. For example, it can be simply set up in a laboratory under an excavator with a laminar flow.

Mask aligner : UV-KUB 3
Insolator high power density : UV-KUB 9

Insolator high power density : UV-KUB 9

The UV KUB 9 are UV LED exposure systems delivering a high-power density at 365nm, adjustable up to 300mW/cm3. It is a homogenous exposure system dedicated to surfaces as large as 9 inches diameter, equipped with a non-collimated source

Learn more : UV-KUB 9

In balance with the UV KUB concept, the system is piloted by a touch-screen and the curing sequence is only launched when the drawer is closed to assure maximum safety to the user. UV KUB 9 is an equipment dedicated to wafer bounding and to the inhibition of the adherence blue tapes films used for automatic dicing systems for micro-electronics. This table-top equipment is very compact and doesn’t require installation in a clean room as with all other UV-KUB.

UV curing adhesive : K‑ILU 1 & 2

UV LED system on small surfaces

Learn more : K ILU 1 &2

The adhesive curing system, the K-ILU is an UV-LED adhesive curing, either keyboard controlled (K-ILU version 1) or touchscreen controlled (K-ILU version 2), offering continuous or flashing programmable curing modes.

UV curing adhesive : K‑ILU 1 & 2