You are here
Direct write lithography :
UV LED insolation & laser lithography systems
With both the Dilase and UV-KUB equipment, Kloé proposes a complete and top of the range of lithography systems.
The Dilase direct writing laser systems
The equipment from the Dilase range are maskless lithography systems based on direct laser writing. The range consists in the following:
A unique depth of focus for high resolution lithography
The Dilase technology delivers numerous innovations and unique specificities on the market of technologies dedicated to direct photolithography by laser. Notably, the capacity to write in layers of resins of several hundred microns with a single laser sweep, thanks to several optical treatments that guarantee a very large depth of focus.
This large depth of focus, unique in the market of lithography equipment with or without masks, opens the door for high-resolution optic photolithography to numerous applications such as microfluidics, guided optics, surface functionalization and micro-mechanics.
By using these systems, you will benefit from greater flexibility and from better reliability of performances in microelectronics but also in other processes more traditional, users of optic lithography technologies. Finally, thanks to this, there is no need to use auto-focus systems which are very often the source of problems and the technological limitations rather than being value-adding.
Combine the writing in vector mode and scanning mode
The Dilase technology also offers the possibility to write in vector or scanning mode or a combination of both writing modes on one same pattern. It is also possible to modulate the write velocity at will in vector mode as well as in scanning mode. Finally, all Dilase equipment offers a large range of specific write modes ranging from a high aspect ratio microstructuring mode (up to 1X80) to grayscale levels structuration, with unlimited levels of grey, or the writing of micropillars in high density on large surfaces with high rate of writing.
Dilase 3D: stereolithography in 3D
Dilase 3D is a high-resolution stereolithography equipment in 3D to produce large volume objects (100X100X50mm3). This high-resolution 3D printer enables you to create micro-structures at micrometric resolution scale. It was designed in partnership with the CNRS laboratory from LAAS in Toulouse for 3D micro-fluidic, bio-medical and bio-technology applications.